4th International Workshop on PiezoMEMS
PiezoMEMS20144th international workshop on Piezoelectric MEMS Oct 28-29, 2014 Kobe, Japan |
Program
Time Table
Invited Speakers
- H. Funakubo (Tokyo Inst. Technol) : Enhancement of Piezoelectric Response Using 90 Degree Domain Switching of Pb(Zr, Ti)O3 Films
- P. Muralt (EPFL) : Recent works in piezoelectric thin films and MEMS devices
- Y. Fujimori (Rohm) : Integrated Manufacturing System for PiezoMEMS
- K. Shibata (Hitachi Metals) : Three-axis angular rate sensors using lead-free KNN piezoelectric films
- J. Akedo (AIST) : High Speed Coating of Ferroelectric Materials by Aerosol Deposition Method
- M. Akamatsu (Stanley Electric) : Development of PZT Films Fabricated by Arc Discharged Reactive Ion Plating and Application to a biaxial optical MEMS scanner
- Y. Akiyama (Ricoh) : Fabrication of Electronic Devices by Sol-gel Inkjet Printing
- S.T-McKinstry (Penn State) : PZT PiezoMEMS with Integrated ZnO Electronics
- T. Metzger (TDK-Epcos) : Piezoelectric RF-MEMS devices for Mobile Phone Applications
- K. Suu (Ulvac) : CMOS-Integratable High-Performance Piezoelectric PZT Film Fabrication for Piezo-MEMS Applications
- G. Le Rhun (CEA Leti) : Integrated piezoelectric devices : from material to prototypes
- R. Polcawitch (Army Research Lab) : PiezoMEMS Technology: Fabrication and Design of Actuators for Mobility
- L. Colombo (ST Microelectronics) : Pilot line integration for PiezoMEMS in the Lab4MEMS project
- F. Tyholdt (SINTEF ICT) : PiezoMEMS development from idea to product - case examples from SINTEF
- C. Troadec (Yole) : Thin film PZT Market and Technology trends