Program

Time Table

Time Table

Invited Speakers

  • H. Funakubo (Tokyo Inst. Technol) : Enhancement of Piezoelectric Response Using 90 Degree Domain Switching of Pb(Zr, Ti)O3 Films
  • P. Muralt (EPFL) : Recent works in piezoelectric thin films and MEMS devices
  • Y. Fujimori (Rohm) : Integrated Manufacturing System for PiezoMEMS
  • K. Shibata (Hitachi Metals) : Three-axis angular rate sensors using lead-free KNN piezoelectric films
  • J. Akedo (AIST) : High Speed Coating of Ferroelectric Materials by Aerosol Deposition Method
  • M. Akamatsu (Stanley Electric) : Development of PZT Films Fabricated by Arc Discharged Reactive Ion Plating and Application to a biaxial optical MEMS scanner
  • Y. Akiyama (Ricoh) : Fabrication of Electronic Devices by Sol-gel Inkjet Printing
  • S.T-McKinstry (Penn State) : PZT PiezoMEMS with Integrated ZnO Electronics
  • T. Metzger (TDK-Epcos) : Piezoelectric RF-MEMS devices for Mobile Phone Applications
  • K. Suu (Ulvac) : CMOS-Integratable High-Performance Piezoelectric PZT Film Fabrication for Piezo-MEMS Applications
  • G. Le Rhun (CEA Leti) : Integrated piezoelectric devices : from material to prototypes
  • R. Polcawitch (Army Research Lab) : PiezoMEMS Technology: Fabrication and Design of Actuators for Mobility
  • L. Colombo (ST Microelectronics) : Pilot line integration for PiezoMEMS in the Lab4MEMS project
  • F. Tyholdt (SINTEF ICT) : PiezoMEMS development from idea to product - case examples from SINTEF
  • C. Troadec (Yole) : Thin film PZT Market and Technology trends