Message to Kobe University Students

In MI-1 lab, we work on researches on leading-edge academic fields in micro and nano sciences and engineering with micro electro mechanical systems (MEMS) technology. We have a wide research fields where micro and nano engeneering is nessesary, with a concept of new creation and invention of micro-machining technology for next generations. We research on invention of nano-scale semiconductor materials, development of new application devices based on micro sensors and actuators, and study on bio-chemical and medical fields.

The laboratory aims to practice world-class leading-edge research. For example, we already have world-class achievements on the the research on physical properties evaluation of new nano semiconductor materials using MEMS technology, and we are working on international joint researches with several European research institutes. In bio-chemical MEMS researches, we have won various academic awards, and joint researches with companies has been started.

These researches are promoted by cooperation of all lab members, based on "Material mechanics", "Mechanical engineering", and "Fluid engineering" as well as "Phisics" and "Semiconductor engineering". Our lab has research environment in which you can practice from theoretical design and fabrication of MEMS to measurement and evaluation consistently.

Through these researches, we primally expect to students to laern practical academic skills, problem-solving skills, and logical ideas whch are needed for international-level professional engineers and researchers. We welcome visiting of students who want to practice the world's leading-edge researches, who are curious and inquisitive, who want to challenge new things, or who want to learn how to solve problems.

Reserch fields

Details:[Research]

(1) Challenges for multiphysics characterization of low-dimensional nano semiconductors

Phisycal properties of semiconductor nanomaterials are different from those of the bulk. Especially, under a giant elastic strain field, one-dimentional nanowire are expected to have a large difference on electrical, magnetic, thermal, and optical properties without failures and, for this reason, the nanowire are expected as a new functional materials for next generation. Therefore we aim to elucidate phisical properties of single nanowire of the semiconductor under a giant strain field using MEMS technology.

◆Mechanical and electrical evaluations of nano-scale structures using MEMS technology
◆Mechanical and electrical evaluations of carbon-based nanowires
  1. FIB-deposited carbon nanotubes (CNT)
  2. Multi-walled carbon nanotubes (CNT)
◆Material properties elucidation of silicon-based nanowires under giant elastic strain field
  1. Single crystal silicon nanowires' mechanical properties at room temperature
     to intermediate temperatures
  2. Mechanical and electrical properties of n-type silicon nanowires grown by VLS bottom up process
  3. A piezo resistive effect of p-type single-crystal silicon nanowires patterned by top-down processes
  4. Giant-strain-induced physical properties of core-shell (C/S) 3C-SiC nanowires
     grown by VLS bottom-up processes

（2）Study for new systhesis of low-dimensional nanowire materials

We mainly research on techniques of synthesis of cabon nanotube(CNT) and silicon nanowire (SiNW) which are one-dimantional nanowire materials. For example, we develop SiNWs'growing techniques with VLS-CVD (vapor-liquid-solid chemical vapor deposition) process using an originally-developped process machine.

◆ Synthesis of carbon nanotubes (CNT) with a density control
◆ Establishment of growing techniques of silicon nanowires usign a VLS-CVD process

(3) Development of new MEMS application devices

We work on development of various devices consisted of micromachinig application sensors and actuators. Especially, we focus on developments of new-functional devices combinated with nanomaterrials.
◆ Development of individually-driving multi-probe cantilever array for low-cost
   scanning probe parallel nanolithography (SPNL) in the atmosphere
   and development of patterning techniques for nanopatterning using it.
◆ Development of length-controllable SPM cantilevers with integrated actuators
   for topology evaluation of both solid and soft surfaces
◆ Development of gas-sensing devices using a MEMS resonator with integnated CNT
   for trace hydrogen gas detection
◆Development of MEMS-based tiny tactile sensors for minimally invasive medical treatments

（4）Fabrication of plasmonic nanostructures and application to bio/chemical sensors with a high sensitivity

We research on fabrication techniques of plasmonic nanostructsres, based on techniques of gold nano particle synthesis and nano particle arrangements. As applications of the techniques, we also research on a technique for single-molecular detection using surface-enhanced raman spectroscopy (SERS) and on bio/ chemical sensing with a high sensitivity.

◆ Micro fluidic devices for gold nano particle synthesis by a high-speed liquid mixing
◆ Arrangement techniques of nano particles
◆ Bio-chemical analysis techniques using SERS with arranged gold nanoparticles
◆ Micro and nano fluidic devices for SERS with linearly-arranged gold nanoparticles
◆ MEMS-resonator devices for laser's frequency detection using optical-thermal conversion on
   periodic gold nanostructures

※ We also work on joint researches with domestic and foreign research institutes for rsearches related to maicromachines and nanomachines.